- title: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomenaissn: 0734-211Xeissn:publisher: New York$$Published for the Society by the American Institute of Physics
| 登录号 | 年 | 卷 | 期 |
|---|---|---|---|
| J069249 | 1989 | 7 | 6 |
| J045471 | 1989 | 7 | 4-5 |
| J044721 | 1989 | 7 | 1-3 |
| J043796 | 1988 | 6 | 5-6 |
| J043474 | 1988 | 6 | 3-4 |
| J043473 | 1988 | 6 | 1-2 |
| J042108 | 1987 | 5 | 1 |
| J042386 | 1987 | 5 | 4-6 |
| J042109 | 1987 | 5 | 2-3 |
| J041144 | 1986 | 4 | 5-6 |
| J040841 | 1986 | 4 | 3-4 |
| J040840 | 1986 | 4 | 1-2 |
| J039699 | 1985 | 3 | 1-3 |
| J039050 | 1985 | 3 | 4-6 |
| J038189 | 1984 | 2 | 1-4 |
| J035963 | 1983 | 1 | 1-2 |
| J036572 | 1983 | 1 | 3-4 |